Determination of migration of ion-implanted Ar and Zn in...

Radiation Effects and Defects in Solids 2015 / 03 Vol. 170; Iss. 3

Determination of migration of ion-implanted Ar and Zn in silica by backscattering spectrometry

Szilágyi, E., Bányász, I., Kótai, E., Németh, A., Major, C., Fried, M., Battistig, G.
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Volume:
170
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420150.2015.1039534
Date:
March, 2015
File:
PDF, 714 KB
english, 2015
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