[IEEE 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) - Singapore, Singapore (2015.5.24-2015.5.27)] 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) - Recent progress on development of sputtered PZT film at FUJIFILM
Hishinuma, Yoshikazu, Fujii, Takamichi, Naono, Takayuki, Arakawa, Takami, Li, YoumingYear:
2015
Language:
english
DOI:
10.1109/ISAF.2015.7172728
File:
PDF, 278 KB
english, 2015