[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - High-Q, large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded metal electrodes
Liu, Yu-Chia, Tsai, Ming-Han, Chen, Wen-Chien, Li, Sheng-Shian, Fang, WeileunYear:
2011
Language:
english
DOI:
10.1109/TRANSDUCERS.2011.5969681
File:
PDF, 4.69 MB
english, 2011