SAW based phononic crystal sensor, technological challenges...

Microsystem Technologies 2016 / 7 Vol. 22; Iss. 7

SAW based phononic crystal sensor, technological challenges and solutions

Schmidt, Marc-Peter, Oseev, Aleksandr, Lucklum, Ralf, Zubtsov, Mikhail, Hirsch, Soeren
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2781-3
Date:
July, 2016
File:
PDF, 972 KB
english, 2016
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