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Mechanical Properties of RF Magnetron Sputtering ZnO Thin Film by Nanoindentation
Zhang, Tianlin, Huang, WenhaoVolume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.C084
Date:
February, 2009
File:
PDF, 459 KB
english, 2009