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Micro-Raman spectroscopic analysis of single crystal silicon microstructures for surface stress mapping
Naka, Nobuyuki, Kashiwagi, Shinsuke, Nagai, Yuji, Namazu, TakahiroVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.106601
Date:
October, 2015
File:
PDF, 3.04 MB
english, 2015