Experimental and simulation study of a capacitively coupled...

Plasma Sources Science and Technology 2016 / 02 Vol. 25; Iss. 1

Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

Derzsi, Aranka, Lafleur, Trevor, Booth, Jean-Paul, Korolov, Ihor, Donkó, Zoltán
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Volume:
25
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/25/1/015004
Date:
February, 2016
File:
PDF, 2.67 MB
english, 2016
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