UHV chemical vapour deposition of silicon nanowires

UHV chemical vapour deposition of silicon nanowires

Schmidt, Volker, Senz, Stephan, Gösele, Ulrich
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Volume:
96
Language:
english
Journal:
Zeitschrift für Metallkunde
DOI:
10.3139/146.018129
Date:
May, 2005
File:
PDF, 164 KB
english, 2005
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