High aspect ratio Si micro-holes formed by wet etching...

High aspect ratio Si micro-holes formed by wet etching using Pt needles

Imamura, Kentaro, Akai, Tomoki, Kobayashi, Hikaru
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Volume:
2
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/2/7/075901
Date:
July, 2015
File:
PDF, 1.19 MB
english, 2015
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