High aspect ratio Si micro-holes formed by wet etching using Pt needles
Imamura, Kentaro, Akai, Tomoki, Kobayashi, HikaruVolume:
2
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/2/7/075901
Date:
July, 2015
File:
PDF, 1.19 MB
english, 2015