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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Plasma doping of high aspect ratio structures
Raj, Deven, Lee, Jun S., Maynard, Helen, Lacey, KerryYear:
2014
Language:
english
DOI:
10.1109/IIT.2014.6940003
File:
PDF, 433 KB
english, 2014