Ultraviolet-Assisted Release of Microelectromechanical...

Journal of Microelectromechanical Systems 2015 / 12 Vol. 24; Iss. 6

Ultraviolet-Assisted Release of Microelectromechanical Systems From Polyimide Sacrificial Layer

Boroumand Azad, Javaneh, Rezadad, Imen, Peale, Robert E., Cleary, Justin W., Eyink, Kurt
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2463096
Date:
December, 2015
File:
PDF, 1.14 MB
english, 2015
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