Ge/ZnS-Based Micromachined Fabry–Perot Filters...

Journal of Microelectromechanical Systems 2015 / 12 Vol. 24; Iss. 6

Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Longwave Infrared

Mao, Haifeng, Silva, K. K. M. B. Dilusha, Martyniuk, Mariusz, Antoszewski, Jarek, Bumgarner, John, Dell, John M., Faraone, Lorenzo
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2474858
Date:
December, 2015
File:
PDF, 1.59 MB
english, 2015
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