![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Second International Conference on Smart Materials and Nanotechnology in Engineering - Weihai, China (Wednesday 8 July 2009)] Second International Conference on Smart Materials and Nanotechnology in Engineering - Research on piezoelectricity materials films of MEMS surface acoustic wave gas sensor
Qiu, Chengjun, Bu, Dan, Liu, Hongmei, Feng, Yafei, Leng, Jinsong, Asundi, Anand K., Ecke, WolfgangVolume:
7493
Year:
2009
Language:
english
DOI:
10.1117/12.840328
File:
PDF, 986 KB
english, 2009