Deposition of IGZO or ITZO Thin Films by Co-Sputtering of IZO and GZO or ITO Targets
Wang, Xin Zhi, Nishimoto, Masaya, Fujii, Toru, Tominaga, Kikuo, Murai, Kei Ichiro, Moriga, Toshihiro, Xu, You LongVolume:
1110
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.1110.197
Date:
June, 2015
File:
PDF, 685 KB
english, 2015