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Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor
Shoaib, Muhammad, Hisham, Nor, Basheer, Noohul, Tariq, MohammadVolume:
88
Language:
english
Journal:
Analog Integrated Circuits and Signal Processing
DOI:
10.1007/s10470-016-0695-3
Date:
July, 2016
File:
PDF, 1.94 MB
english, 2016