Confining Liquids on Silicon Surfaces to Lubricate MEMS

Tribology Letters 2015 / 7 Vol. 59; Iss. 1

Confining Liquids on Silicon Surfaces to Lubricate MEMS

Leong, Jonathan Y., Zhang, Jie, Sinha, Sujeet K., Holmes, Andrew, Spikes, Hugh, Reddyhoff, Tom
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Volume:
59
Language:
english
Journal:
Tribology Letters
DOI:
10.1007/s11249-015-0541-2
Date:
July, 2015
File:
PDF, 1.39 MB
english, 2015
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