Subsurface imaging of metal lines embedded in a dielectric with a scanning microwave microscope
You, Lin, Ahn, Jung-Joon, Obeng, Yaw S, Kopanski, Joseph JVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/4/045502
Date:
February, 2016
File:
PDF, 2.82 MB
english, 2016