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Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nanoelectronic devices
Bender, H, Franquet, A, Drijbooms, C, Parmentier, B, Clarysse, T, Vandervorst, W, Kwakman, LVolume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/11/114015
Date:
November, 2015
File:
PDF, 1.93 MB
english, 2015