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The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas
Korolov, I, Derzsi, A, Donkó, Z, Schüngel, E, Schulze, JVolume:
25
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/25/1/015024
Date:
February, 2016
File:
PDF, 5.10 MB
english, 2016