Surface modification of SU-8 for metal/SU-8 adhesion using...

Materials Research Express 2015 / 08 Vol. 2; Iss. 8

Surface modification of SU-8 for metal/SU-8 adhesion using RF plasma treatment for application in thermopile detectors

Ashraf, Shakeel, Mattsson, Claes G, Fondell, Mattis, Lindblad, Andreas, Thungström, Göran
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Volume:
2
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/2/8/086501
Date:
August, 2015
File:
PDF, 1.42 MB
english, 2015
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