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Control of Thin Film Growth in Chemical Vapor Deposition Manufacturing Systems: A Feasibility Study
Chiu, Wilson K. S., Jaluria, Yogesh, Glumac, Nick G.Volume:
124
Year:
2002
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.1465434
File:
PDF, 560 KB
english, 2002