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A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements
Napoli, Mariateresa, Bamieh, Bassam, Turner, KimberlyVolume:
126
Year:
2004
Language:
english
Journal:
Journal of Dynamic Systems, Measurement, and Control
DOI:
10.1115/1.1767851
File:
PDF, 393 KB
english, 2004