Statistical Process Control Based Supervisory Generalized Predictive Control of Thin Film Deposition Processes
Jin, Jionghua, Guo, Huairui, Zhou, ShiyuVolume:
128
Year:
2006
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.2114912
File:
PDF, 549 KB
english, 2006