Measurement of Biaxial Stress States in Silicon Using...

Journal of Applied Mechanics 2006 Vol. 73; Iss. 5

Measurement of Biaxial Stress States in Silicon Using Micro-Raman Spectroscopy

Gustafson, Peter A., Harris, Stephen J., O’Neill, Ann E., Waas, Anthony M.
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Volume:
73
Year:
2006
Language:
english
Journal:
Journal of Applied Mechanics
DOI:
10.1115/1.2187527
File:
PDF, 957 KB
english, 2006
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