Characterization of “Bulk Lithography” Process for...

Journal of Micro and Nano-Manufacturing 2013 / 10 Vol. 1; Iss. 4

Characterization of “Bulk Lithography” Process for Fabrication of Three-Dimensional Microstructures

Gandhi, Prasanna, Bhole, Kiran
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Volume:
1
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4025461
Date:
October, 2013
File:
PDF, 1.37 MB
english, 2013
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