Theoretical Analysis and Experimental Quantification of the...

Journal of Electronic Packaging 2014 / 07 Vol. 136; Iss. 3

Theoretical Analysis and Experimental Quantification of the Gas Leakage Due to Electrical Feedthroughs in Anodic Bonding

Liu, Qimin, Du, Lidong, Zhao, Zhan, Liu, Cheng, Fang, Zhen
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Volume:
136
Language:
english
Journal:
Journal of Electronic Packaging
DOI:
10.1115/1.4028013
Date:
July, 2014
File:
PDF, 967 KB
english, 2014
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