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[ASME ASME 2011 Conference on Smart Materials, Adaptive Structures and Intelligent Systems - Scottsdale, Arizona, USA (September 18–21, 2011)] ASME 2011 Conference on Smart Materials, Adaptive Structures and Intelligent Systems, Volume 1 - Fabrication and Characterization of Gallium Nitride Unimorphs for Optical MEMS Applications
Ramesh, Prashanth, Washington, Gregory N., Krishnamoorthy, Sriram, Rajan, SiddharthYear:
2011
Language:
english
DOI:
10.1115/smasis2011-5213
File:
PDF, 1.42 MB
english, 2011