SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining Technology for Micro-Optics and Nano-Optics IV - SU 8 multiple layer structuring by means of maskless photolithography (DWL66)
Saghiri, Amir A., Kaden, Matthias, Rössler, Konrad, Wijnaendts, Roel, Preuss, Sven, Forozan, Alexander, Johnson, Eric G., Nordin, Gregory P., Suleski, Thomas J.Volume:
6110
Year:
2006
Language:
english
DOI:
10.1117/12.643777
File:
PDF, 690 KB
english, 2006