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SPIE Proceedings [SPIE Fourth International Seminar on Modern Cutting and Measuring Engineering - Beijing, China (Friday 10 December 2010)] Fourth International Seminar on Modern Cutting and Measurement Engineering - Development of the precision long-stroke 3-DOF nano-stage for the photonic crystal process
Jywe, Wen-Yuh, Liu, Chien-Hung, Lin, Bor-Jeng, Lee, Meng-Tse, Lee, Jeng-Dao, Teng, Yun-Feng, Hsieh, Tung-Hsien, Xin, Jiezhi, Zhu, Lianqing, Wang, ZhongyuVolume:
7997
Year:
2011
Language:
english
DOI:
10.1117/12.888361
File:
PDF, 931 KB
english, 2011