Reconstruction at the interface of one cycle of...

Reconstruction at the interface of one cycle of trimethylaluminum and water on GaAs(111)A-2×2 from atomic layer deposition

Fanchiang, Yu-Ting, Chiang, Tsung-Hung, Pi, Tun-Wen, Wertheim, Gunther K., Kwo, J. Raynien, Hong, Minghwei
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Volume:
8
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.8.126602
Date:
December, 2015
File:
PDF, 885 KB
english, 2015
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