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[IEEE 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium - Atlanta, GA, USA (7-10 Oct. 2001)] 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263) - Ultrasonically stimulated diffusion of impurities in dislocation free silicon at room temperature
Ostrovskii, I.V., Nadtochiy, A.B., Steblenko, L.P., Podolyan, A.A.Volume:
1
Year:
2001
Language:
english
DOI:
10.1109/ULTSYM.2001.991649
File:
PDF, 666 KB
english, 2001