Effect of Geometry and Materials on Residual Stress...

Effect of Geometry and Materials on Residual Stress Measurement in Thin Films by Using the Focused Ion Beam

Kang, Ki-Ju, Darzens, Severine, Choi, Gee-Seob
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Volume:
126
Year:
2004
Language:
english
Journal:
Journal of Engineering Materials and Technology
DOI:
10.1115/1.1789965
File:
PDF, 1.70 MB
english, 2004
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