Surface Finishing and Evaluation of Three-Dimensional...

Journal of Manufacturing Science and Engineering 2004 Vol. 126; Iss. 4

Surface Finishing and Evaluation of Three-Dimensional Silicon Microchannel Using Magnetorheological Fluid

Kim, Wook-Bae, Lee, Seung-Hwan, Min, Byung-Kwon
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Volume:
126
Year:
2004
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.1811113
File:
PDF, 875 KB
english, 2004
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