Mechanical Approach to Nanomachining of Silicon Using Oxide...

Journal of Manufacturing Science and Engineering 2004 Vol. 126; Iss. 4

Mechanical Approach to Nanomachining of Silicon Using Oxide Characteristics Based on Tribo Nanolithography (TNL) in KOH Solution

Park, Jeong Woo, Kawasegi, Noritaka, Morita, Noboru, Lee, Deug Woo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
126
Year:
2004
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.1811114
File:
PDF, 521 KB
english, 2004
Conversion to is in progress
Conversion to is failed