DMCMN: In Depth Characterization and Control of AFM...

Journal of Dynamic Systems Measurement and Control 2009 Vol. 131; Iss. 6

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Fantner, Georg E., Burns, Daniel J., Belcher, Angela M., Rangelow, Ivo W., Youcef-Toumi, Kamal
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Volume:
131
Year:
2009
Language:
english
Journal:
Journal of Dynamic Systems, Measurement, and Control
DOI:
10.1115/1.4000378
File:
PDF, 908 KB
english, 2009
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