Error Sources in Atomic Force Microscopy for Dimensional...

Journal of Manufacturing Science and Engineering 2010 Vol. 132; Iss. 3

Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling

Marinello, F., Carmignato, S., Voltan, A., Savio, E., De Chiffre, L.
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Volume:
132
Year:
2010
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4001242
File:
PDF, 630 KB
english, 2010
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