Emerging Challenges of Microactuators for Nanoscale...

Journal of Manufacturing Science and Engineering 2010 Vol. 132; Iss. 3

Emerging Challenges of Microactuators for Nanoscale Positioning, Assembly, and Manipulation

Sahu, Bijoyraj, Taylor, Curtis R., Leang, Kam K.
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Volume:
132
Year:
2010
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4001662
File:
PDF, 1.23 MB
english, 2010
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