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Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)
Virwani, Kumar R., Malshe, Ajay P., Rajurkar, Kamlakar P.Volume:
132
Year:
2010
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4001718
File:
PDF, 1.03 MB
english, 2010