[ASME ASME 2011 International Mechanical Engineering Congress and Exposition - Denver, Colorado, USA (November 11–17, 2011)] Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration - Polymerization Shrinkage and Adhesion in UV-Nanoimprint Lithography
Amirsadeghi, Alborz, Lee, Jae Jong, Park, SunggookYear:
2011
Language:
english
DOI:
10.1115/imece2011-62486
File:
PDF, 233 KB
english, 2011