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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - Microlenses metrology with digital holographic microscopy
Charriere, Florian, Kuhn, Jonas, Colomb, Tristan, Montfort, Frederic, Cuche, Etienne, Emery, Yves, Weible, Kenneth, Depeursinge, Christian D., Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Volume:
5856
Year:
2005
Language:
english
DOI:
10.1117/12.612600
File:
PDF, 891 KB
english, 2005