[IEEE ESSDERC 2015 - 45th European Solid-State Device Research Conference - Graz, Austria (2015.9.14-2015.9.18)] 2015 45th European Solid State Device Research Conference (ESSDERC) - Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices
Suarez-Segovia, Carlos, Leroux, Charles, Domengie, Florian, Dabertrand, Karen, Joseph, Vincent, Romano, Giovanni, Caubet, Pierre, Zoll, Stephane, Weber, Olivier, Ghibaudo, Gerard, Reimbold, Gilles, HaYear:
2015
Language:
english
DOI:
10.1109/ESSDERC.2015.7324760
File:
PDF, 260 KB
english, 2015