Scanning Grating Microinterferometer for MEMS Metrology

Journal of Manufacturing Science and Engineering 2004 Vol. 126; Iss. 4

Scanning Grating Microinterferometer for MEMS Metrology

Kim, Byungki, Schmittdiel, Michael C., Degertekin, F. Levent, Kurfess, Thomas R.
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Volume:
126
Year:
2004
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.1812773
File:
PDF, 388 KB
english, 2004
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