Characterization of SiC and Si3N4 coatings synthesized by means of inductive thermal plasma from disilane precursors
E. Bouyer, G. Schiller, M. Müller, R. H. HenneVolume:
15
Year:
2001
Language:
english
Pages:
8
DOI:
10.1002/aoc.237
File:
PDF, 265 KB
english, 2001