[ASME 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems - Sanya, Hainan, China (January 10–13, 2007)] First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B - PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser

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