![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Lasers in Material Processing and Manufacturing II - Silicon microstructuring using ultrashort laser pulses
Zhu, Jingtao, Li, Wen, Zhao, Ming, Yin, Gang, Chen, Xiao, Chen, Deying, Zhao, Li, Deng, ShuShen, Matsunawa, Akira, Yao, Y. Lawrence, Zhong, MinlinVolume:
5629
Year:
2005
Language:
english
DOI:
10.1117/12.571965
File:
PDF, 238 KB
english, 2005