Research, design and experiment of end effector for wafer...

Industrial Robot / An International Journal 2012 / 01 Vol. 39; Iss. 1

Research, design and experiment of end effector for wafer transfer robot

Liu, Yanjie, Xu, Meng, Cao, Yumei
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Volume:
39
Language:
english
Journal:
Industrial Robot: An International Journal
DOI:
10.1108/01439911211192529
Date:
January, 2012
File:
PDF, 661 KB
english, 2012
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