[ASME ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Las Vegas, Nevada, USA (September 4–7, 2007)] Volume 1: 21st Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C - An Alternate Geometry for a Piezoelectric MEMS Microphone, Part I: Design and Analysis
Littrell, Robert, Cheng, Lei, Grosh, KarlYear:
2007
Language:
english
DOI:
10.1115/detc2007-35484
File:
PDF, 275 KB
english, 2007