![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Electron Technology Conference 2013 - Ryn, Poland (Tuesday 16 April 2013)] Electron Technology Conference 2013 - Structural analysis of epitaxial NbTiN films
Guziewicz, M., Laszcz, A., Domagala, J. Z., Golaszewska, K., Ratajczak, J., Kruszka, R., Juchniewicz, M., Czerwinski, A., Slysz, W., Szczepanski, Pawel, Kisiel, Ryszard, Romaniuk, Ryszard S.Volume:
8902
Year:
2013
Language:
english
DOI:
10.1117/12.2031303
File:
PDF, 1.23 MB
english, 2013