SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - MOEMS pressure sensors for propulsion applications
Boyd, Joseph T., Dasgupta, Samhita, Jackson, Howard E., Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396511
File:
PDF, 283 KB
english, 2000