Post-deposition annealing effect on RF-sputtered TiO2...

Applied Physics 2016 / 2 Vol. 122; Iss. 2

Post-deposition annealing effect on RF-sputtered TiO2 thin-film properties for photonic applications

Hadjoub, Ilhem, Touam, Tahar, Chelouche, Azeddine, Atoui, Mohamed, Solard, Jeanne, Chakaroun, Mahmoud, Fischer, Alexis, Boudrioua, Azzedine, Peng, Lung-Han
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Volume:
122
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-015-9570-9
Date:
February, 2016
File:
PDF, 2.96 MB
english, 2016
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